Plasma Electronics. Applications in Microelectronic Device Fabrication
- Título:
- Plasma Electronics. Applications in Microelectronic Device Fabrication
- Materia:
- Engineering & Technology; Physical Sciences
- Editor:
- CRC Press
- Descripción:
- 360 p.
- Identificadores:
- ISBN: 9780429193316
- Colección:
- Taylor Francis