Microelectronic Applications of Chemical Mechanical Planarization
- Título:
- Microelectronic Applications of Chemical Mechanical Planarization
- Materia:
- Chemical Engineering
- Editor:
- Wiley-Interscience
- Descripción:
- 761 p.
- Identificadores:
- E-ISBN: 9780471719199 ISBN: 9780470180907
- Colección:
- Wiley