Chemical Mechanical Planarization of Microelectronic Materials
- Título:
- Chemical Mechanical Planarization of Microelectronic Materials
- Materia:
- Mechanical Engineering
- Editor:
- Wiley-VCH
- Descripción:
- 338 p.
- Identificadores:
- E-ISBN: 9780471138273 ISBN: 9783527617746
- Colección:
- Wiley