Enabling Technologies for MEMS and Nanodevices - Advanced Micro and Nanosystems

Título:
Enabling Technologies for MEMS and Nanodevices - Advanced Micro and Nanosystems
Autor:
Baltes
Materia:
Electrical & Electronics Engineering
Editor:
Wiley-VCH
Descripción:
440 p.
Identificadores:
E-ISBN: 9783527307463 ISBN: 9783527616701
Colección:
Wiley