Handbook of Cleaning in Semiconductor Manufacturing: Fundamental and Applications
- Título:
- Handbook of Cleaning in Semiconductor Manufacturing: Fundamental and Applications
- Materia:
- Electrical & Electronics Engineering
- Editor:
- Wiley-Scrivener
- Descripción:
- 615 p.
- Identificadores:
- E-ISBN: 9780470625958 ISBN: 9781118071748
- Colección:
- Wiley