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1. CMOS-MEMS
Baltes
Wiley-VCH
E-ISBN: 9783527310807 ISBN: 9783527616718
2. Microengineering of Metals and Ceramics Part 1 - Design, Tooling, and Injection Molding
Baltes
Wiley-VCH
E-ISBN: 9783527312085 ISBN: 9783527616725
3. Microengineering of Metals and Ceramics Part 2 - Special Replication Techniques, Automation, and Properties
Baltes
Wiley-VCH
E-ISBN: 9783527314935 ISBN: 9783527616732
4. Enabling Technologies for MEMS and Nanodevices - Advanced Micro and Nanosystems
Baltes
Wiley-VCH
E-ISBN: 9783527307463 ISBN: 9783527616701